Leakage current characteristics of SrTiO3/LaNiO3/Ba0.67Sr0.33TiO3/SrTiO3 heterostructure thin films
来源期刊：Rare Metals2021年第4期
论文作者：Yi Zhang Xiao-Yang Chen Bin Xie Zhi Wang Qiao He Hang Ji Tao-Lan Mo Ping Yu
文章页码：961 - 967
摘 要：There is an urgent demand to explore new approaches of improving the electric breakdown strength of the ferroelectric thin-film capacitor without the degradation of the high dielectric constant.In this work,LaNiO3/Ba0.67Sr0.33TiO3（LNO/BST） thin film and SrTiO3（STO）/LNO/BST/SrTiO3（STO） were prepared by using radio frequency（RF） magnetron sputtering technique and ultrathin STO insulator layers were inserted between the LNO/BST and metal electrodes（Au or Pt） to improve the electric breakdown strength and the leakage current of the LNO/BST thin film.X-ray diffraction（XRD） and scanning electron microscopy（SEM） investigations revealed that these multilayer thin films show compact,smooth and uniform morphologies.The leakage current density of STO/LNO/BST/STO thin film was decreased by one order of magnitude and breakdown strength of STO/LNO/BST/STO thin film was enhanced from 0.72 to 1.26 MV-cm-1compared with that of LNO/BST thin film.Moreover,the dielectric constant of the STO/LNO/BST/STO thin film keeps at the same level as that of LNO/BST thin film,and dielectric loss of the STO/LNO/BST/STO thin film was decreased slightly compared with that of LNO/BST thin film.
Yi Zhang1，Xiao-Yang Chen1，Bin Xie1，Zhi Wang1，Qiao He1，Hang Ji1，Tao-Lan Mo1，Ping Yu1
1. College of Material Science and Engineering,Sichuan University
摘 要：There is an urgent demand to explore new approaches of improving the electric breakdown strength of the ferroelectric thin-film capacitor without the degradation of the high dielectric constant.In this work,LaNiO3/Ba0.67Sr0.33TiO3（LNO/BST） thin film and SrTiO3（STO）/LNO/BST/SrTiO3（STO） were prepared by using radio frequency（RF） magnetron sputtering technique and ultrathin STO insulator layers were inserted between the LNO/BST and metal electrodes（Au or Pt） to improve the electric breakdown strength and the leakage current of the LNO/BST thin film.X-ray diffraction（XRD） and scanning electron microscopy（SEM） investigations revealed that these multilayer thin films show compact,smooth and uniform morphologies.The leakage current density of STO/LNO/BST/STO thin film was decreased by one order of magnitude and breakdown strength of STO/LNO/BST/STO thin film was enhanced from 0.72 to 1.26 MV-cm-1compared with that of LNO/BST thin film.Moreover,the dielectric constant of the STO/LNO/BST/STO thin film keeps at the same level as that of LNO/BST thin film,and dielectric loss of the STO/LNO/BST/STO thin film was decreased slightly compared with that of LNO/BST thin film.
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