Effects of Growth Temperature on Structural and Electrical Properties of Li-N-H Codoped ZnO
来源期刊：JOURNAL OF MATERIALS SCIENCE TECHNOLOG2013年第2期
论文作者：Y.F. Lu Z.Z. Ye L.P. Zhu Y.J. Zeng J.Y. Huang B.H. Zhao
文章页码：154 - 156
摘 要：Effects of growth temperature on the structural and electrical properties of Li-N-H codoped ZnO thin films grown by DC reactive magnetron sputtering were investigated. Scanning electron microscopy and X-ray diffraction results showed that increasing growth temperature could improve the crystalline quality. But Hall measurement results showed that growth temperature had a nonlinear influence on the electrical property. The variation of electrical properties with the growth temperature was found to be related to the activated concentration of N in ZnO and the evaporation of Li during the growth process, derived from the Hall measurement and the second ion mass spectroscopy measurement.
Y.F. Lu，Z.Z. Ye，L.P. Zhu，Y.J. Zeng，J.Y. Huang，B.H. Zhao
State Key Laboratory of Silicon Materials, Department of Materials Science and Engineering, Zhejiang University
摘 要：Effects of growth temperature on the structural and electrical properties of Li-N-H codoped ZnO thin films grown by DC reactive magnetron sputtering were investigated. Scanning electron microscopy and X-ray diffraction results showed that increasing growth temperature could improve the crystalline quality. But Hall measurement results showed that growth temperature had a nonlinear influence on the electrical property. The variation of electrical properties with the growth temperature was found to be related to the activated concentration of N in ZnO and the evaporation of Li during the growth process, derived from the Hall measurement and the second ion mass spectroscopy measurement.
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