Structural Characterization of Laser Bonded Sapphire Wafers Using a Titanium Absorber Thin Film
来源期刊：JOURNAL OF MATERIALS SCIENCE TECHNOLOG2015年第5期
论文作者：A.de Pablos-Martín S.Tismer Th.Hche
文章页码：484 - 488
摘 要：Two sapphire substrates were tightly bonded by irradiation with a 1064 nm nanosecond laser and using a sputtered 50 nm-titanium thin film as an absorbing medium.Upon laser irradiation,aluminum from the upper substrate is incorporated into the thin film,forming Ti-Al-O compounds.While the irradiated region becomes transparent,the bond quality was evaluated by scanning acoustic microscopy.
A.de Pablos-Martín，S.Tismer，Th.Hche
摘 要：Two sapphire substrates were tightly bonded by irradiation with a 1064 nm nanosecond laser and using a sputtered 50 nm-titanium thin film as an absorbing medium.Upon laser irradiation,aluminum from the upper substrate is incorporated into the thin film,forming Ti-Al-O compounds.While the irradiated region becomes transparent,the bond quality was evaluated by scanning acoustic microscopy.
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