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Trans. Nonferrous Met. Soc. China 22(2012) s729-s734 Synthesis and properties of Cr-Al-Si-N films deposited by hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and DC pulse... with high power impulse magnetron sputtering (HIPIMS) and a DC pulse sputtering using Cr and AlSi targets under N2/Ar atmosphere. By varying the sputtering current of the AlSi target in the range of 0-2.5......
magnetron sputtering (DC-MS) source of carbon and a high power impulse magnetron sputtering (HIPIMS) source of Cr with reactive gas of C2H2. The hydrogen-free GLC and Cr-doped GLC films were also... at the bias voltage of -100 V. Key words: graphite-like carbon; high power impulse magnetron sputtering; substrate bias; microstructure; tribological behavior 1 Introduction Carbon is one of the most......
Dependence of characteristics of LaB6 films on DC magnetron sputtering power XU Jing(徐 静)1, 2, MIN Guang-hui(闵光辉)1, HU Li-jie(胡立杰)1, ZHAO Xiao-hua(赵晓华)1, YU Hua-shun(于化顺)1 1. School of Materials... by electric hot air blower. Deposition was carried out in a double room combined systems of high vacuum magnetron sputter and ion beam sputter. During the sputtering, temperature of the substrate......
Corrosion behaviors of Cr-Al-N coatings deposited by reactive magnetron sputtering DUO Shu-wang(多树旺)1, 2, ZHU Ming(朱 明)2, 3, LIU Ting-zhi(刘庭芝)1, LI Zhong-jun(李忠峻)1, WANG Peng(王... 110016, China Received 15 July 2007; accepted 10 September 2007 Abstract: CrN and Cr-Al-N coatings were deposited by reactive magnetron sputtering on the glass substrate, and their corrosion behavior......
Microstructure and Properties of the Cr–Si–N Coatings Deposited by Combining High-Power Impulse Magnetron Sputtering(HiPIMS) and Pulsed DC Magnetron SputteringTie-Gang Wang1,2,Yu Dong1,Belachew Abera... Center for Hybrid Interface Materials,Pusan National University摘 要:The Cr–Si–N coatings were prepared by combining system of high-power impulse magnetron......
Silver-palladium alloy deposited by DC magnetron sputtering method as lubricant for high temperature application Jung-Dae KWON1, Sung-Hun LEE1, Koo-Hyun LEE1, Jong-Joo RHA1, Kee-Seok NAM1, Sang... for its application to the high temperature stud bolts used in nuclear power plants. A hex bolt sample was prepared in the following steps: 1) bolt surface treatment using alumina grit blasting for cleaning......
stable cycle ability and a high specific discharge capacity, which was attributed to the alloying effect of the LiNiO2and LiCoO2. 关键词:microbattery; magnetron sputtering; MEMS; thin film; [全文内容正在添加中] ...Application of Magnetron Sputtering in Fabricating MEMS Microbatteries SHEN Wan1,YANG Zhi-min1,DU Jun1,MAO Chang-hui1,XING Guang-jian1 (1.Research Center of Energy Materials & Technology, General......
J. Cent. South Univ. Technol. (2008) 15: 449-453 DOI: 10.1007/s11771-008-0084-x Photoluminescence properties of ZnO thin films prepared by DC magnetron sputtering YANG Bing-chu(杨兵初), LIU Xiao-yan...; Abstract: ZnO thin films were prepared by direct current(DC) reactive magnetron sputtering under different oxygen partial pressures......
Preparation of TiAlN/ZrN and TiCrN/ZrN multilayers by RF magnetron sputtering Jong-Kook LEE1, 2, Gwon-Seung YANG1 1. Department of Advanced Materials Engineering, Chosun University, Gwangju... prepared by RF magnetron sputtering, and their microstructural evolution and corrosion resistance during heat treatment were investigated. The TiAlN/ZrN and TiCrN/ZrN multilayer coatings are degraded......
current magnetron sputtering (DCMS). The film is pure Sn and consists of particles with an average diameter of 100 nm. The thickness of the film estimated by ICP is about 320 nm. It has a high lithium... Preparation of Sn nano-film by direct current magnetron sputtering and its performance as anode of lithium ion battery ZHAO Ling-zhi(赵灵智)1, 2, HU She-jun(胡社军)2, 3, LI Wei-shan(李伟善)2, HOU Xian......