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Laser micromachining of CNT/Fe/Al2O3 nanocomposites Kwang-Ryul KIM1, Byoung-Deog CHOI1, Jun-Sin YI1, Sung-Hak CHO2, Yong-Ho CHOA3, Dong-Soo SHIN4, Dong-Ho BAE5, Myung-Chang KANG6... nm. After sintering, CNTs were homogenously located throughout Al2O3 grain boundary and were buckled. A femto-second laser installed with special optical systems was used for micromachining......
Review of micromachining of ceramics by etching H. T. TING1, K. A. ABOU-EL-HOSSEIN2, H. B. CHUA1 1. School of Engineering and Science, Curtin University of Technology (Sarawak Campus... material removal rate and improved tool life. Micromachining using chemical etching is one of those methods that do not involve the problem of tool life and direct tool-work piece contact. However......
基于非硅表面微加工的MEMS惯性开关设计与动力学仿真 丁桂甫1,付世1,杨卓青1,赵小林1,蔡豪刚1 (1.上海交通大学微纳科学技术研究院,薄膜与微细技术教育部重点实验室,微米纳米加工技术国家级重点实验室,上海,200030) 摘要:基于非硅表面微加工技术,设计了一种新的MEMS微型惯性电学开关.较厚的质量块可动电极和位于其上方悬空的弹性梁固定电极,不但有利于提高开关器件的触发灵敏度和接触效果,而且可避免质量块和弹簧过多偏离对器件造成的损坏.对所设计开关进行了有限元动态接触仿真,结果表明开关在100g加速度作用下的响应时间和接触时间分别约为0.24ms和10μs,表现出较高的触发灵敏度和......
体硅微机械湿法加工技术研究进展蒋玉荣1,2,边长贤3,秦瑞平1,21. 河南师范大学物理与信息工程学院2. 河南省光伏材料重点实验室3. 江西师范大学化学与化工学院摘 要:湿法腐蚀技术成本低,是硅微机械(Micromachining)加工中最基础,最关键的技术.着重讨论了3种主要湿法技术的优缺点,概述了硅的各向同性存在侧向腐蚀,各向异性受晶格限制以及电化学腐蚀受图形尺寸限制的缺点和局限性,探讨了国内外研究现状和湿法腐蚀技术存在的问题及今后电化学腐蚀技术在湿法技术中的地位.关键词:体硅技术;各向异性;电化学腐蚀;......
" name="ChDivSummary">The objective of this research is to prepare specially designed surface texture on hard steel surface by electrochemical micromachining (EM) and to incorporate electroless plated... the best wear resistance of the hard steel discs after electrochemical micromachining treatment and electroless plating of Ag/MoS2 solid lubricating coating.关键词:......
. To fabricate the Si based microactuator with trilayered film, micromachining processes including RIE (Reac- tive Ion Etching) and selective DC magnetron sputtering techniques were combined. The deposited......
the magnetostriction property of composite film increase in low magnetic field. To fabricate the Si based microactuator with trilayered film, micromachining processes including RIE (Reactive Ion Etching......
for the micro-arc oxidation are abrasive wear and micromachining wear. These are related to their microstructures. Key words: AZ91D magnesium alloy; micro-arc oxidation; increase extent; corrosion resistance... the increase extent of voltage is 15 V. The main reason is that the matrix wear mechanism is micromachining wear[24], the wild grooves and straight scratches imply bigger wear rate and smaller friction......
are traditionally fabricated by silicon micromachining or dicing. The fabrication cost of silicon micromachining is very high, however, because several expensive masks are needed. Furthermore... the momentum transfer efficiency of AWJ machining, an abrasive suspension method was recently developed. This method provides excellent micromachining results. Researches on micro water jet cutting......
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