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by radio frequency (RF) magnetron sputtering method on glass substrates under different substrate temperatures. The nature of MZO film is polycrystalline with hexagonal structure and a preferred......
" name="ChDivSummary"><正>The NiO-Cu composite films were deposited on a glass substrate at various substrate temperatures by DC reactive magnetron sputtering technique.The effect of substrate......
="ChDivSummary" name="ChDivSummary">FePt (50 nm) and [FePt(a nm)/MgO(b nm)]5/glass (a=1, 2, 3; b=1, 2, 3) films were prepared by radio frequency (RF) magnetron sputtering technique, and then were annealed......
Magnetron sputtering deposition of [FePt/Ag]_n multilayers for perpendicular recordingWANG Fang, XU Xiaohong, and WU Haishun School of Chemistry and Materials Science, Shanxi Nonnal University, Linfen 041004, China摘 要:<正>[FePt/Ag]n multilayers were deposited on glass substrates by RF magnetron sputtering and ex situ annealed at 550℃ for 30 min......
Effects of Annealing Temperature on the Properties of Copper Films Prepared by Magnetron Sputtering刘一鸣1,2,ZHANG Jianjun1,ZHANG Wanggang1,梁伟1,YU Bin1,XUE Jinbo11. College of Materials Science and Engineering, Taiyuan University of Technology摘 要:Copper oxide thin films were prepared by a direct-current magnetron sputtering method followed by a thermal......
Phase control of magnetron sputtering deposited Gd2O3 thin films as high-κ gate dielectrics岳守晶,魏峰,王毅,杨志民,屠海令,杜军摘 要:Gd2O3 thin films as high-κ gate dielectrics were deposited directly on Si(001) substrates by magnetron sputtering at a pressure of 1.3 Pa and different temperatures. X-ray diffraction results revealed that all the films grown from 450......
Study of lithium storage properties of the Sn-Ni alloys prepared by magnetic sputtering technologyXianhua HOU, Shejun HU, Wei PENG, Zhiwen ZHANG and Qiang RU School of Physics and Telecommunication Engineering, South China Normal University, Guangzhou 510006, China摘 要:Nano-level Sn-Ni alloy thin-film electrode materials prepared by magnetic sputtering......
Effect of Heat-treatment on Crystalline Phase and UV Absorption of 60CeO2-40TiO2 Thin Films by Magnetron Sputtering倪佳苗1,2,3,赵修建11. State Key Laboratory of Silicate Materials for Architectures (Wuhan... of Technology摘 要:60CeO2-40TiO2 thin films were deposited on soda-lime silicate glass substrates by R.F. magnetron sputtering. The effects of heat-treatment......
Influence of Deposition Pressure on Properties of ZnO:Al Films Fabricated by RF Magnetron Sputtering刘超英1,2,3,HE Feng3,YAN Ningning1,2,ZANG Shuguang1,2,ZUO Yan1,2,MA Juanrong11. China Building...) films were prepared on glass substrates by rf(radio frequency) magnetron sputtering from ZnO: 3wt% Al2O3 ceramic target. The effect of argon gas pressure(PAr) was investigated with small variations......
Structure and Growth Mechanism of V/Ag Multilayers with Different Periodic Thickness Fabricated by Magnetron Sputtering DepositionHongxiu Zhang,Feng Ren,Mengqing Hong,Xiangheng Xiao,Guangxu Cai... with different periodic thicknesses were fabricated by magnetron sputtering deposition.The columnar structure and the orientation relationship of the multilayers were investigated by transmission electron......
