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analysis (TGA). The thermal oxide film covered silicon wafer was chemical mechanical polished (CMP) by composite abrasives, and the polishing behavior of the novel composite abrasives was characterized... abrasives; core-shell structure; coating; chemical mechanical polishing 化学机械抛光/平坦化(Chemical-mechanical polishing,CMP)是超大规模集成电路制造工艺中的关键技术之一,抛光浆料中磨料的自身特性(磨料的种类,形貌,粒径和粒径分布,力学性质以及表面性质等)对抛光表面的质量(粗糙度,平整度以及......
Effect of mechanical anisotropy on material removal rate and surface quality during polishing CdZnTe wafersLI Yana,JIE Wanqia,KANG Renkeb,and GAO Hangb a State Key laboratory of Solidification...,Dalian 116024,China摘 要:The mechanical characters of CdZnTe crystal were investigated by nanoscratch tests,and the effects of mechanical anisotropy......
Densification mechanism of chemical vapor infiltration technology for carbon/carbon composites CHEN Jian-xun(陈建勋), XIONG Xiang(熊 翔), HUANG Qi-zhong(黄启忠), YI Mao-zhong(易茂中), HUANG Bai-yun(黄伯云... chemical vapor infiltration(CVI) technology with propane (C3H6) as the carbon precursor gas and nitrogen (N2) as the carrier gas. The chemical process of deposition of pyrolytic carbon was deduced......
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ratio of black rust. Fig.6 Morphologies of chemical conversion coating after salt spray test (white color on whole surface, black filamentous): (a) After polishing only; (b) Under standard condition... Surface characteristics of chemical conversion coating for Mg-Al alloy Masazumi OKIDO1, Ryoichi ICHINO1, Seong-Jong KIM2, Seok-Ki JANG2, 1. Nagoya University, Furo-cho, Chikusa-ku......
Trans. Nonferrous Met. Soc. China 22(2012) s722-s728 Microstructure evolution and mechanical properties of Ti-B-N coatings deposited by plasma-enhanced chemical vapor deposition Jung Ho SHIN1,2... hardness, mechanical strength, chemical inertness, as well as good high- temperature stability [1]. Among them, titanium nitride (TiN) coatings have been widely applied to cutting tools, forming dies......
Microstructures and mechanical properties of Mg-10Ho-0.6Zr-xNd alloys LIU Bao-zhong(刘宝忠)1, LIU Jiao-jiao(刘娇娇)1, HOU Xiu-li(侯秀丽)2, 3, ZHANG Zhi(张 志)1, LI Lei(李 雷)1, WANG Li-min(王立民)3 1. School... January 2010 Abstract: Mg-10Ho-0.6Zr-xNd (x=0, 1, 3 and 5, mass fraction, %) alloys were prepared by metal mould casting, and the microstructures and mechanical properties were investigated. The results......
Microstructure and mechanical properties of Mg-6Al-4RE-0.4Mn alloy WANG Jian-li(王建利)1, 2, PENG Qiu-ming(彭秋明)1, 2, WU Yao-ming(吴耀明) 1, WANG Li-min(王立民)1 1. Key Laboratory of Rare Earth Chemistry... carried out. The microstructure and mechanical properties of both as-cast and T6 treated alloys were investigated at room temperature and 423 K. It is found that the intermetallic compounds......
Rapid chemical vapor infiltration of C/C composites ZHANG Ming-yu(张明瑜)1, 2, WANG Li-ping(王丽平)3, HUANG Qi-zhong(黄启忠)2, CHAI Li-yuan(柴立元)1 1. School of Metallurgical Science... as diluent, C/C composites were fast fabricated by using a multi-physics field chemical vapor infiltration (MFCVI) process in a self-made furnace. A set of orthogonal experiments were carried out......
Effect of electrochemical polishing time on surface topography of mild steelBaocheng Wang1,2) and Jinhua Zhu1) 1) State Key Laboratory for Mechanical Behavior of Metal Materials, Xi’an Jiaotong... in altitude density function (ADF) of the surface topography of mild steel during electrochemical polishing (ECP) was investigated, and the mechanism of the variation of surface roughness with polishing time......