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prepared byusing r.f. magnetron sputtering onto glass substrate. The effect of sputtering param-eters, including Ar gas pressure and input rf power, on the structure and magneticproperties....%, however, saturation magnetizationwas much smaller than its calculation value. Key words:Fe-Cu thin film; magnetic property; sputtering condition; nano-crystalline; [全文内容正在添加中] ......
Trans. Nonferrous Met. Soc. China 26(2016) 1655-1662 Structural and optoelectronic properties of AZO thin films prepared by RF magnetron sputtering at room temperature Yi-hua SUN1, Hai-lin WANG1... target by RF magnetron sputtering at room temperature. The microstructure, surface morphology, optical and electrical properties of AZO thin films were investigated by X-ray diffractometer, scanning......
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PREPARATION AND SURFACE CHARACTERIZATION OF TiO2 THIN FILMS ON GLASS BY MAGNETRON SPUTTERING METHOD J.X.Zhang1,H.Shen2,L.S.Yin3 (1.Department of Physics,Zhongshan University,Guangzhou 510275,China... deposited on glass substrates by magnetron sputtering method,then sintered the Ti thin films in air atmosphere and finally TiO2 transparence thinfilms on glass substrates were obtained. The structure......
Application of Magnetron Sputtering in Fabricating MEMS Microbatteries SHEN Wan1,YANG Zhi-min1,DU Jun1,MAO Chang-hui1,XING Guang-jian1 (1.Research Center of Energy Materials & Technology, General... microbatteries are reviewed and suggestedmagnetron sputtering in fabricating a high-performance microbattery. The technics as annealing are analyzed. The microbattery with a LiNi1-x Cox O2 cathode exhibited......
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magnetron sputtering[J]. Surface & Coatings Technology, 2010,204(21/22): 3490-3500. [10] CHOI W S, JOUNG Y H, HEO J, HONG B. Friction force microscopy study of annealed diamond-like carbon film[J...):1403-1410. WANG Yu-xing, LOU Bai-yang, PAN Jian, ZHANG Xia. High temperature oxidation resistance of CrMoAlN gradient coatings prepared by unbalanced magnetron sputtering[J]. The Chinese Journal......
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Fabrication of NiO Buffer Layer for YBCO Coated Conductors by Combining Sputtering and SOE Method Yang Haitao1,Yuan Guansen2,Wang Xiaohua1,LIU Huizhong2,Yang Jian2,Gu Hongwei2 (1.National Center... sputtering and SOE method to obtain crack-free and cube textured NiO layer were reported. Ni tapes prepared by the combination of rolling and recrystallization were used for this work. A coating of Ni......