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) Abstract:The filtered cathodic vacuum-arc (FCVA) technique is a supplementary and alternative technique with respect to convendtional physical and chemical vapour deposition which can remove macro-particles...THE EFFECTS OF NEGATIVE BIAS AND FLUX RATIO ON THE PROPERTIES OF TiN THIN FILMS FORMED BY FILTERED CATHODIC ARC PLASMA TECHNIQUE J.Wang1,W.W. Zhang1,Z.G. Wu1,Q.J. Xue2,Y.J.Zhang1,P.X. Yan1......
. Structure and properties of cathodic vacuum arc deposited NbN and NbN-based multi-component and multi-layer coatings[J]. Surface and Coatings Technology,2007, 201(13): 6122-6130. [9] HOY R, KAMMINGA J D... and vapor deposition[J]. Materials Science and Engineering A, 2004, 387-389: 758-762. [12] ROMERO J, G?MEZ M A, ESTEVE J, MONTAL? F, CARRERAS L, GRIFOL M, LOUSA A. CrAlN coatings deposited by cathodic arc......
2014 Abstract: Ti/TiN/Zr/ZrN multilayer coatings were deposited on Cr17Ni2 steel substrates with different surface roughnesses by vacuum cathodic arc deposition method. Microstructure, micro-hardness... and physical properties should be conducted. In this work, Ti/TiN/Zr/ZrN multi-composition and multilayer coatings with alternant soft and hard structure were prepared by vacuum cathodic arc deposition......
Properties of TiAlCrN coatings prepared by vacuum cathodic arc ion platingRU Qiang~a HU Shejun~a HUANG Nacan~b ZHAO Lingzhi~b QIU Xiuli~c HU Xianqi~c ~a School of Physics and Communication....,Shenzhen 518053,China摘 要:<正>TiAlCrN coatings were deposited by means of vacuum cathodic arc ion plating technique on TC11(Ti-6.5Al-3.5Mo-1.5Zr-0.3Si......
TiN/CrN multilayered hard coatings with TiCrN interlayer deposited by a filtered cathodic vacuum arc techniqueChengming Li, Qi He, Gang Lin, Xiaojun Sun, Weizhong Tang, and Fanxiu LuMaterials Science... speed steel substrates by using a filtered cathodic vacuum arc technique. The structure and composition of the coatings were characterized by scanning electron microscopy (SEM) and Auger electron......
steel with a thin CrN film, deposited by cathodic vacuum arc deposition technique [J]. Surface and Coatings Technology, 2007, 202(4-7): 750-754. [7] ODEN M, ALMER J, HAKANSSON G. The effects of bias...): 1267-1276. [11] CHENG Y H, TAY B K. Deposition pressure dependence of internal stress in TiN films deposited by filtered cathodic vacuum arc [J]. Journal of Vacuum Science and Technology A, 2003, 21......
的红外光学窗口增透保护薄膜材料. 关键词: 非晶金刚石; 过滤阴极真空电弧; 红外保护膜 中图分类号: O461.21 文献标识码: A Amorphous diamond films deposited by filtered cathodic vacuum arc technology as infrared protective coatings HAN Jie-cai, ZHU Jia-qi (Center for Composite Materials, Harbin Institute of Technology, Harbin 150080, China) Abstract: Amorphous diamond (a-D) films deposited by filtered cathodic vacuum arc (FCVA) technology......
TiAlN/Cu Nanocomposite Coatings Deposited by Filtered Cathodic Arc Ion PlatingLei Chen,Zhiliang Pei,Jinquan Xiao,Jun Gong,Chao SunInstitute of Metal Research,Chinese Academy of Sciences摘 要:TiAlN/Cu nanocomposite coatings with Cu concentration of 0–1.4 at.% were deposited on the highspeed steel(HSS) substrates by filtered cathodic arc ion plating......
been deposited on the substrates of single crystalline Si, pure Ti and stainless steel 18-8 by a method of vacuum cathode arc deposition(VCAD). The composition, microstructure and micro-hardness... roughness of the films. The maximum value of micro-hardness belongs to the DLC films deposited under the hydrogen pressure of 0.35Pa and the negative bias of 100V. Key words:DLC films; vacuum cathode arc......
Deposition of photocatalytic TiO2 and N-doped TiO2 films by arc ion plating LI Ming-sheng(李明升), ZHANG Shu-juan(张淑娟), LOU Jin(娄 瑾), LIU Ting-zhi(刘庭芝), ZHOU Ze-hua(周泽华), YANG Gan-lan(杨干兰... 2007 Abstract: TiO2 and N-doped TiO2 films were deposited on the glass substrates by arc ion plating method. The results show that the deposition rate does not change with the increasing deposition......