An Effort for Improving Transport Efficiency of Plasma in Acurved Magnet Filter

LIU You-ming¹，CHU P K²，LI Liuhe¹，Hu Yawei¹，CAI Xun¹，XU Ming¹

(1.School of materials science and technology, Shanghai Jiao Tong University, Shanghai 200240;
2.Dept. of Physics & Materials Science, City University of Hong Kong, Kowloon, Hong Kong;
3. School of Mechanical Engineering and Automation ,Beijing University of Aeronautics and Astronautics. Beijing, 100083, P. R. China)

摘要:In this article an effort was made to increase the efficiency of plasma transmission by using a additional wire netting between the substrate and the filter duct which was floated. The substrate was biased with a negative voltage or connected to anode, respectively. the parameters of the exited plasma and ion saturation current are examined by Langmuir probe and current collector plate. It was found that When the wire netting is connected to apositive voltage and the substrate is biased with a negative voltage, the ion saturation current and ion density had obviously improvement . The result proved that this method could improve the ion saturation current and ion density.

关键词:curved magnet filter; Langmuir probe; ion saturation current; ion density;

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