Abstract: The composition and structure of the passive film on Pb-Sn alloys were studied by X-ray photo electron spectroscopy(XPS) in order to determine the chemical valence number and existing state of alloying elements in passive layers and to elucidate the effect of Sn content on the electronic conductivity of the passive layers. It is found that the passive film has two-layered structure with SnO2, SnO, PbSO4, PbOx(1x·Sn1-xO2 in outer layer, and SnO2, SnO, PbO, PbOx and PbOx·Sn1-xO2 in inner layer. Sn can improve the formation of PbOx(1<x<2) which results in the increase of conductivity of the passive film. From outer layer to inner one, the contents of Sn and Pb increase and O content decreases.
The composition and structure of the passive film on Pb-Sn alloys were studied by X-ray photo electron spectroscopy(XPS) in order to determine the chemical valence number and existing state of alloying elements in passive layers and to elucidate the effect of Sn content on the electronic conductivity of the passive layers. It is found that the passive film has two-layered structure with SnO2, SnO, PbSO4, PbOx(1<x<2) and PbOx·Sn1-xO2 in outer layer, and SnO2, SnO, PbO, PbOx and PbOx·Sn1-xO2 in inner layer. Sn can improve the formation of PbOx(1<x<2) which results in the increase of conductivity of the passive film. From outer layer to inner one, the contents of Sn and Pb increase and O content decreases.
图3 含2.60%Sn的铅锡合金钝化膜的XPS谱 Fig.3 Survey spectra of passive films on Pb-Sn alloy containing 2.60%Sn (a)—After 3 min sputtering; (b)—After 30 min sputtering
图4 含2.6%Sn的铅锡合金钝化膜中Pb的XPS高分辨率谱 Fig.4 Spectra of lead(4f5/2, 4f7/2) in passive films on Pb-Sn alloys containing 2.60%Sn (a)—After 3 min sputtering; (b)—After 30 min sputtering
图5 含2.60%Sn的铅锡合金钝化膜中Sn的XPS高分辨率谱 Fig.5 XPS spectra of Sn(3d5/2, 3d3/2) in passive films on Pb-Sn alloys containing 2.60%Sn (a)—After 3 min sputtering; (b)—After 30 min sputtering
表2 各种物质的结合能数据 Table 2 Binding energies of materials concerned
Element
Material
Binding energy/eV
O 1s
PbO(tetragonal)
531.60
PbO2
529.00
PbSO4
531.50
SnO
530.10
SnO2
530.60
Pb 4f7/2
Pb
136.40
PbO
138.85
PbO2
137.40
PbSO4
139.40
Sn3d5
SnO
486.90
SnO2
486.65
表3 铅氧化合物的结合能数据 Table 3 Binding energies ofdifferent lead oxides(eV)
图7所示为4种不同含锡量的铅锡合金钝化膜表层(溅射3min)中Sn 3d的XPS高分辨谱, 其中峰1和峰2分别对应于Sn 3d3/2和Sn 3d5/2。 合金中含锡量较高(2.60%Sn)时, Sn 3d能谱曲线中仅出现1, 2两峰, 见图7(a); 当含锡量降低(1.57%Sn, 1.06%Sn)后, Sn 3d的谱图中除1, 2峰外, 还出现了1′, 2′两个峰, 见图7(b)和(c)。
由铅锡合金钝化膜组分的有关讨论可知, 这些特征峰值均对应于Sn的不同氧化物, Sn 3d的XPS高分辨谱中所有的峰值结合能数据汇总于表4。 从表4可以看出, 峰2和峰1的差值为8.4 eV, 而
图6 含2.60%Sn的铅锡合金钝化膜中O 1s的XPS高分辨率谱 Fig.6 XPS spectra of O 1s in passive films on Pb-Sn alloys containing 2.60%Sn (a)—After 3 min sputtering; (b)—After 30 min sputtering
图7 4种铅锡合金钝化膜表层(溅射3 min)中Sn 3d的谱峰(3d5/2(2)和3d3/2(1)) Fig.7 Spectra of Sn3d(3d5/2(2)and 3d3/2(1))in passive films on Pb-Sn alloys containing different contents of Sn after 3 min sputtering (a)—2.60%Sn; (b)—1.57%Sn; (c)—1.06%Sn; (d)—0.532%Sn
表4 铅锡合金钝化膜中合金元素锡的峰值结合能数据 Table 4 Binding energies of various signals of tin in passive film on Pb-Sn alloys
图10 铅锡合金钝化膜表层用电子束溅射前后Pb 4f的谱峰 Fig.10 XPS spectra of Pb 4f in passive films on Pb-Sn alloys before and after electron beam sputtering (a)—Specimen containing 0.532%Sn; (b)—Specimen containing 1.06%Sn; (c)—Specimen containing 1.57%Sn; (d)—Specimen containing 2.60%Sn
图11 铅锡合金钝化膜表层用Ar+束分别真空溅射3 min和30 min后Sn 3d(3d5/2(2) 和3d3/2(1))的谱峰 Fig.11 Spectra of tin(3d5/2(2) and 3d3/2(1)) in passive films on Pb-Sn alloys after 3 min and 30 min sputtering (a)—Specimen containing 2.60%Sn; (b)—Specimen containing 1.57%Sn; (c)—Specimen containing 1.06%Sn; (d)—Specimen containing 0.532%Sn
图12 铅锡合金钝化膜表层用Ar+束分别真空溅射3 min和 30 min后Pb 4f(Pb 4f7/2(2)和Pb 4f5/2(1))的谱峰 Fig.12 Spectra of lead(4f7/2(2) and 4f5/2(1)) in passive films on Pb-Sn alloys after 3 min and 30 min sputtering (a)—Specimen containing 2.60%Sn; (b)—Specimen containing 1.57%Sn; (c)—Specimen containing 1.06%Sn; (d)—Specimen containing 0.532%Sn
图13 铅锡合金钝化膜表层用Ar+束分别真空溅射3 min和30 min后O 1s的谱峰 Fig.13 Spectra of oxygen in passive films on Pb-Sn alloys after 3 min and 30 min sputtering (a)—Specimen containing 2.60%Sn; (b)—Specimen containing 1.57%Sn; (c)—Specimen containing 1.06%Sn; (d)—Specimen containing 0.532%Sn