Electrodeposition and growth mechanism of preferentially orientated nanotwinned Cu on silicon wafer substrate
来源期刊：JOURNAL OF MATERIALS SCIENCE TECHNOLOG2018年第10期
论文作者：Fu-Long Sun Li-Yin Gao Zhi-Quan Liu Hao Zhang Tohru Sugahara Shijo Nagao Katsuaki Suganuma
文章页码：1885 - 1890
摘 要：Homogeneous columnar Cu film with fully embedded nanotwins was successfully fabricated on Ti/Cu seed layer on silicon wafer. The nanotwins with thickness of tens of nanometers are generally parallel to the silicon surface, showing a strong（111） preferred orientation. The acid concentration was found to be important in influencing the formation of nanoscale twins. By adjusting the acid concentration,the nanotwins can be induced from the top columnar grain to middle columnar grain and reach the bottom equiaxed grain, and a microstructural transformation model was given. A theory focusing on the cathode overpotential was proposed to reveal the effect of acid concentration on the growth mechanism of nanoscale twins. An appropriate adsorption proportion of hydrogen on cathode(acid concentration17 ml L-1) could increase the overpotential which supplies adequate nucleation energy for nanoscale twins formation.
Fu-Long Sun1,2，Li-Yin Gao1,2，Zhi-Quan Liu1,2,3，Hao Zhang3，Tohru Sugahara3，Shijo Nagao3，Katsuaki Suganuma3
1. Institute of Metal Research, Chinese Academy of Sciences2. University of Chinese Academy of Sciences3. Institute of Scientific and Industrial Research, Osaka University
摘 要：Homogeneous columnar Cu film with fully embedded nanotwins was successfully fabricated on Ti/Cu seed layer on silicon wafer. The nanotwins with thickness of tens of nanometers are generally parallel to the silicon surface, showing a strong（111） preferred orientation. The acid concentration was found to be important in influencing the formation of nanoscale twins. By adjusting the acid concentration,the nanotwins can be induced from the top columnar grain to middle columnar grain and reach the bottom equiaxed grain, and a microstructural transformation model was given. A theory focusing on the cathode overpotential was proposed to reveal the effect of acid concentration on the growth mechanism of nanoscale twins. An appropriate adsorption proportion of hydrogen on cathode(acid concentration17 ml L-1) could increase the overpotential which supplies adequate nucleation energy for nanoscale twins formation.
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