Thickness distribution of large scale metallic sheet by EB-PVD on rotating substrate

来源期刊：中国有色金属学报(英文版)2005年第z3期

论文作者：单英春 赫晓东 李明伟 李垚

文章页码：232 - 235

Key words：thickness distribution； large scale metallic sheet； kinetic Monte-Carlo method； rotating substrate； electric beam physical vapor deposition(EB-PVD)；

Abstract: A two-dimensional kinetic Monte-Carlo(KMC) method was used to approach the thickness distribution of large scale metallic sheet deposited by electron beam physical vapor deposition(EB-PVD) on rotating substrate. The KMC model involves incident atom attachment, adatom diffusion and adatom detachment. The effective deposition rate and effective incident angle along substrate radial were studied as influencing factors of sheet thickness distribution. The KMC simulation results indicate that incident angle is a very important factor to affect the sheet thickness distribution as well as theory deposition mass. The experiments results show that the KMC model can predict the thickness distribution of large scale sheet deposited by EB-PVD on rotating substrate.