Hybrid Micro-forming Processes and Quality Evaluation of Micro-double Gear

徐杰

School of Materials Science and Engineering,Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education,Harbin Institute of Technology

摘 要：Micro-gear is an important actuating component used widely in the micro electro mechanical systems（MEMS） devices.The technologies of micro-forming and precision assembly are urgently developed to manufacture the micro-double gear with central shaft.In the paper,a novel hy-brid-forming process with two kinds of piercing method have been proposed to manufacture the micro-double gear using micro forming technology.The tests of hybrid forming process were carried out with two steps and the micro-double gear was successfully manufactured with good surface quality.The results also show that the hybrid micro-forming process with central piercing method can improve the defects of inclining shaft generated by double-ended piercing method.The quality evaluation of micro-double gear was conducted with surface roughness,micro-hardness and impact tests.The results show that the micro-double gear with good mechanical properties can meet the requirements of application for milli-machines.

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