Surface Modification of PVD-TiN Films Using MEVVAIon Implantation
来源期刊：材料热处理学报2004年第5期
论文作者：CHENG Ming-fei GONG Yun-guo YANG Jian-hua ZHANG Tong-he
关键词：PVD-TiN; MEVVA ion implantation; surface Modification; XPS; HVEM;
摘 要：Ti ion implantation was implanted into PVD-TiN films using a metal vapor vacuum arc (MEVVA) ion source implanted zone was measured and compared to the performance of unimplanted zone by a pin-on-disc apparatus and an optical interference microscope. The structure of the implanted zone and unimplanted zone was observed by X-ray photoelectron spectroscopy (XPS) and high voltage electron microscopy (HVEM). The wear mechanisms of the TiN film after ion implantation were discussed according to the results of XPS and HVEM.
CHENG Ming-fei1，GONG Yun-guo1，YANG Jian-hua1，ZHANG Tong-he3
(1.Department of Physics, Nantong University, Jiangsu , China;
2.Department of Physics, Nantong Institute of Technology, Jiangsu , China;
3.Radiation Beam and Materials Engineering Lab, Beijing Normal University, Beijing, China)
摘要:Ti ion implantation was implanted into PVD-TiN films using a metal vapor vacuum arc (MEVVA) ion source implanted zone was measured and compared to the performance of unimplanted zone by a pin-on-disc apparatus and an optical interference microscope. The structure of the implanted zone and unimplanted zone was observed by X-ray photoelectron spectroscopy (XPS) and high voltage electron microscopy (HVEM). The wear mechanisms of the TiN film after ion implantation were discussed according to the results of XPS and HVEM.
关键词:PVD-TiN; MEVVA ion implantation; surface Modification; XPS; HVEM;
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