氮和碳对洁净区宽度的影响
来源期刊：中南大学学报(自然科学版)1993年第6期
论文作者：佘思明 刘培东
文章页码：826 - 830
关键词：直拉硅; 洁净区; 杂质
Key words：CZSi; denuded zone; impurity
摘 要：氮与碳的存在,降低了产生氧沉淀的初始间隙氧浓度的阈值,使洁净区宽度缩小。
Abstract: The influence of nitrogen and carbon on the width of denuded zone has been investigatedin this paper. The experimental results indicate that nitrogen and carbon may significantlydecrease the [Oi]0c, resulting in shallower denuded zone.
