Structure and Properties of TiO2-CeO2 Films Deposited on Soda-Lime Silicate Glass Substrates by R.F.Magnetron Sputtering
来源期刊：JOURNAL OF RARE EARTHS2004年增刊第3期
论文作者：Zhao Qingnan Ni Jiamiao Zhang Naizhi Jiang Hong Wang Guirong ZHAO Xiujian
Key words：R.F. sputtering; TiO2-CeO2 films; ultraviolet-shielding coating glass;
Abstract: TiO2-CeO2 films were deposited on soda-lime glass substrates at different ratio of O2 to Ar (0.10, 0.15,0.20) by R. F. magnetron sputtering. The structure, surface composition, UV-visible spectrum of the films were measured by scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy and spectrometer. The results show that the films are amorphous, and the relative molar ratio of Ce to Ti is higher than that of the target at lower ratio of O2 to Ar. Only tetravalent Ti +4 and Ce +4 ions are present in the films, and the obtained TiO2 -CeO2 films appear good uniformity and high density. The films deposited on the glass can shield ultraviolet light without significant absorption of visible light.
Zhao Qingnan1，Ni Jiamiao1，Zhang Naizhi1，Jiang Hong2，Wang Guirong2，ZHAO Xiujian1
(1.Key Laboratory of Silicate Materials Science and Engineering, Wuhan University of Technology, Ministry of Education, Wuhan 430070, China;
2.China Luoyang Float Glass Group Co. Ltd. Luoyang 471009, China)
Abstract:TiO2-CeO2 films were deposited on soda-lime glass substrates at different ratio of O2 to Ar (0.10, 0.15,0.20) by R. F. magnetron sputtering. The structure, surface composition, UV-visible spectrum of the films were measured by scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy and spectrometer. The results show that the films are amorphous, and the relative molar ratio of Ce to Ti is higher than that of the target at lower ratio of O2 to Ar. Only tetravalent Ti +4 and Ce +4 ions are present in the films, and the obtained TiO2 -CeO2 films appear good uniformity and high density. The films deposited on the glass can shield ultraviolet light without significant absorption of visible light.
Key words:R.F. sputtering; TiO2-CeO2 films; ultraviolet-shielding coating glass;
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