Deposition behavior and tribological properties of diamond-like carbon coatings on stainless steels via chemical vapor deposition
来源期刊：International Journal of Minerals Metallurgy and Materials2018年第11期
论文作者：Labani Mustafi M.M.Rahman Mohammad Nur E Alam Al Nasim Mohammad Asaduzzaman Chowdhury M.H.Monir
文章页码：1335 - 1343
摘 要：A systematic investigation was carried out to observe the deposition rate of a diamond-like carbon（DLC） coating on two stainless steel substrates by chemical vapor deposition（CVD）. The objective of this research is to study the deposition behavior of the DLC coating and its tribological properties in different combinations of methane（CH4） and nitrogen, which were used as precursor gases. The results reveal that the deposition rate increases with increasing CH4 content up to 50 vol%. The hardness of the DLC-deposited layer also increases while the friction coefficient decreases with increasing CH4 gas content up to 50% in the precursor gas mixture.
Labani Mustafi1，M.M.Rahman2，Mohammad Nur E Alam Al Nasim2，Mohammad Asaduzzaman Chowdhury3，M.H.Monir3
1. School of Materials Science and Engineering,Harbin Institute of Technology2. School of Engineering,RMIT University3. Dhaka University of Engineering and Technology
摘 要：A systematic investigation was carried out to observe the deposition rate of a diamond-like carbon（DLC） coating on two stainless steel substrates by chemical vapor deposition（CVD）. The objective of this research is to study the deposition behavior of the DLC coating and its tribological properties in different combinations of methane（CH4） and nitrogen, which were used as precursor gases. The results reveal that the deposition rate increases with increasing CH4 content up to 50 vol%. The hardness of the DLC-deposited layer also increases while the friction coefficient decreases with increasing CH4 gas content up to 50% in the precursor gas mixture.
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