Effects of Substrate Pulse Bias Duty Cycle on the Microstructure and Mechanical Properties of Ti–Cu–N Films Deposited by Magnetic Field-Enhanced Arc Ion Plating
来源期刊：Acta Metallurgica Sinica2017年第2期
论文作者：Sheng-Sheng Zhao Yan-Hui Zhao Lv-Sha Cheng Vladimir Viktorovich Denisov Nikolay Nikolaevich Koval Bao-Hai Yu Hai-Juan Mei
文章页码：176 - 184
摘 要：Ti–Cu–N films were deposited on 316 L stainless steel substrates by magnetic field-enhanced arc ion plating.The effect of substrate pulse bias duty cycle on the chemical composition,microstructure,surface morphology,mechanical and tribological properties of the films was systemically investigated.The results showed that,with increasing the duty cycle,Cu content decreases from 3.3 to 0.58 at.%.XRD results showed that only Ti N phase is observed for all the deposited films and the preferred orientation transformed from Ti N（200） to Ti N（111） plane with the increase in duty cycle.The surface roughness and deposition rate showed monotonous decrease with increasing the duty cycle.The residual stress and hardness firstly increase and then decrease afterwards with the increase in duty cycle,while the variation of critical load shows reverse trend.Except for the film with duty cycle of 10%,others perform the better wear resistance.
Sheng-Sheng Zhao1，Yan-Hui Zhao2，Lv-Sha Cheng1，Vladimir Viktorovich Denisov3，Nikolay Nikolaevich Koval3，Bao-Hai Yu2，Hai-Juan Mei1
1. School of Mechanical and Electrical Engineering,Shenzhen Polytechnic2. Institute of Metal Research,Chinese Academy of Sciences3. Institute of High Current Electronics,Siberian Branch,Russian Academy of Sciences
摘 要：Ti–Cu–N films were deposited on 316 L stainless steel substrates by magnetic field-enhanced arc ion plating.The effect of substrate pulse bias duty cycle on the chemical composition,microstructure,surface morphology,mechanical and tribological properties of the films was systemically investigated.The results showed that,with increasing the duty cycle,Cu content decreases from 3.3 to 0.58 at.%.XRD results showed that only Ti N phase is observed for all the deposited films and the preferred orientation transformed from Ti N（200） to Ti N（111） plane with the increase in duty cycle.The surface roughness and deposition rate showed monotonous decrease with increasing the duty cycle.The residual stress and hardness firstly increase and then decrease afterwards with the increase in duty cycle,while the variation of critical load shows reverse trend.Except for the film with duty cycle of 10%,others perform the better wear resistance.
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