图书来源：二元合金相图及中间相晶体结构 二元合金相图及中间相晶体结构
作 者：唐仁政 田荣璋
出版时间：2009-05
定 价：320元
图书ISBN：978-7-81105-831-4
出版单位：中南大学出版社
Chenguang GONG+;Fuchu SHEN;Biguang YE;Jian CHEN, Zhenjiang University, Hangzhou, 310027, China
摘 要：<正> This article discusses the silicon lattice damage induced during H-plasma in-situ cleaning and findsthat the substrate temperature, plasma power, processing time, all affect the extent of the distortion ofthe surface and its curability.
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