辉光放电离子溅射在扫描电镜样品制备中的应用

来源期刊：冶金分析2011年第3期

论文作者：余卫华 陈士华 李江文 张穗忠

文章页码：6 - 10

关键词：辉光放电； 溅射； 扫描电镜； 样品制备； 热镀锌板

Key words：glow discharge (GD)； sputtering； scanning electron microscopy (SEM)； sample preparation； hot-dip galvanized steel sheet

摘    要：辉光光谱仪的样品激发方式是阴极溅射,逐层分离。这个特点决定了该技术也可用于扫描电镜的样品制备中。扫描电镜可以用于观测热镀锌板镀层中的各种相,但由于某些相的厚度太薄,截面无法观测。本文利用辉光光谱仪对热镀锌板样品进行表面溅射,用扫描电镜对得到的不同厚度处的"新"表面进行了形貌观测,用能谱仪进行成分分析,达到了观测镀层中几乎所有相的目的,表明辉光放电离子溅射是一种可行的扫描电镜样品制备方法。

Abstract: The sample excitation mode of glow discharge optical emission spectrometer was cathode sputtering and layer-by-layer separation.This character indicated that this technique could also be used in the sample preparation for scanning electron microscopy(SEM).SEM could be used to observe all phases in the coating of hot-dip galvanized steel sheet.However,some phases were too thin,so the cross section could not be observed.In this study,the surface of hot-dip galvanized steel sheet sample was sputtered by glow spectrometer.Then,the morphology of "new" surface with different thicknesses was observed by SEM,and the composition was analyzed by energy disperse spectroscopy.The aim to observe all phases in the coating of hot-dip galvanized steel sheet was realized.It indicated that glow discharge ion sputtering was a feasible method of sample preparation for scanning electron microscopy.