Characterization of (100)-orientated diamond film grown by HFCVD method with a positive DC bias voltage

来源期刊:中国有色金属学报(英文版)2006年第z1期

论文作者:马莹 王林军 刘建敏 苏青峰 徐闰 彭鸿雁 史伟民 夏义本

文章页码:313 - 316

Key words:(100)-orientation; diamond film;, HFCVD; positive bias

Abstract: The (100)-orientated diamond film was deposited by hot-filament chemical vapor deposition (HFCVD) technology with a positive DC bias voltage. The morphology, X-ray diffraction (XRD), RAMAN spectrum and dark current versus applied voltage characteristics analysis show that the positive dc bias can increase the nucleation density and (100)-orientated growth, making the growth of the high quality diamond film easier and cheaper than using other methods.

基金信息:Shanghai Leading Academic Discipline, China

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