Effects of substrate temperature and deposition time on the morphology and corrosion resistance of FeCoCrNiMo_0.3 high-entropy alloy coating fabricated by magnetron sputtering

Chun-duo Dai^1,2，Yu Fu^1,2，Jia-xiang Guo^1,2，Cui-wei Du^1,2,3

1. Institute for Advanced Materials and Technology, University of Science and Technology Beijing2. Key Laboratory for Corrosion and Protection, Ministry of Education3. Beijing Advanced Innovation Center for Materials Genome Engineering, University of Science and Technology Beijing

摘 要：The effects of substrate temperature and deposition time on the morphology and corrosion resistance of FeCoCrNiMo_0.3 coating fabricated by magnetron sputtering were investigated by scanning electron microscopy and electrochemical tests. The FeCoCrNiMo_0.3 coating was mainly composed of the face-centered cubic phase. High substrate temperature promoted the densification of the coating, and the pitting resistance and protective ability of the coating in 3.5 wt% NaCl solution was thus improved. When the deposition time was prolonged at 500°C, the thickness of the coating remarkably increased. Meanwhile, the pitting resistance improved as the deposition time increased from 1 to 3 h;however, further improvement could not be obtained for the coating sputtered for 5 h. Overall, the pitting resistance of the FeCoCrNiMo_0.3 coating sputtered at 500°C for 3 h exceeds those of most of the reported high-entropy alloy coatings.

关键词：