Si/Nanocrystalline Diamond Film Heterojunction Diodes Preparation
来源期刊：JOURNAL OF RARE EARTHS2006年增刊第1期
论文作者：Cui Jiangtao Wang Linjun Xia Yiben Tan Shouhong Wu Nanchun
Key words：nanocrystalline diamond film; p-n heterojunction diode; rectification characterization; EACVD;
Abstract: With electron assisted hot filament chemical vapor deposition technology, nanocrystalline diamond films were deposited on polished n-(100)Si wafer surface. The deposited films were characterized and observed by Raman spectrum, X-ray diffraction, semiconductor characterization system and Hall effective measurement system. The results show that with EA-HFCVD, not only an undoped nanocrystalline diamond films with high-conductivity (p-type semiconducting) but also a p-n heterojunction diode between the nanocrystalline diamond films and n-Si substrate is fabricated successfully. The p-n heterojunction has smaller forward resistance and bigger positive resistance. The p-n junction effective is evident.
Cui Jiangtao1，Wang Linjun1，Xia Yiben1，Tan Shouhong2，Wu Nanchun1
(1.School of Materials Science & Engineering, Shanghai University, Shanghai 200072, China;
2.Shanghai Institute of Ceramics, Chinese Academy of China, Shanghai 200050, China)
Abstract:With electron assisted hot filament chemical vapor deposition technology, nanocrystalline diamond films were deposited on polished n-(100)Si wafer surface. The deposited films were characterized and observed by Raman spectrum, X-ray diffraction, semiconductor characterization system and Hall effective measurement system. The results show that with EA-HFCVD, not only an undoped nanocrystalline diamond films with high-conductivity (p-type semiconducting) but also a p-n heterojunction diode between the nanocrystalline diamond films and n-Si substrate is fabricated successfully. The p-n heterojunction has smaller forward resistance and bigger positive resistance. The p-n junction effective is evident.
Key words:nanocrystalline diamond film; p-n heterojunction diode; rectification characterization; EACVD;
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