纳米Al2O3颗粒的制备及其悬浮液的分散稳定
来源期刊：中南大学学报(自然科学版)2003年第5期
论文作者：宋晓岚 杨振华 邱冠周 曲选辉
文章页码：484 - 488
关键词：溶胶-凝胶法;纳米Al2O3; CMP;分散剂;分散稳定性
Key words：sol-gel method; Al2O3 nanoparticles; CMP; dispersant; dispersion and stability
摘 要：以异丙醇铝为原料,甲苯为溶剂,氨水为pH值调节剂,采用溶胶-凝胶法制备了含有α和θ2种晶型的高纯纳米Al2O3颗粒.产物经XRD,TEM以及BET测定和杂质含量分析,研究了不同pH值、分散剂种类及其用量对Al2O3悬浮液分散稳定性的影响.研究结果表明:产物的主晶相是θ,次晶相是α; Al2O3颗粒粒径为10~20 nm,粒子呈球形或类球形,粒子尺寸分布较均匀,比表面积为82.31 m2/g;纯度≥99.95%;配制稳定的Al2O3 CMP浆料的合适工艺条件为:在Al2O3固含量为6%的浆料中,加入质量分数为10%的H2O2作为氧化剂,体积分数为0.99%的异丙醇胺作为分散剂,同时将浆料的pH值控制在3~4,能得到长时间不沉降的稳定浆料.
Abstract: Al2O3 particles were synthesized by sol-gel method with alumium isopropoxide as raw material, toluene as solvent and ammonia as regulator of pH. The analysis of XRD and TEM indicates that Al2O3 particles contain θandαcrystal phases, the Al2O3 particles are 10~20 nm in diameter and uniformly distributed, with the shape of sphere or like sphere. The analyses of BET and content of impurity results show that the specific surface of Al2O3 particles is 82.31 m2/g and purity of Al2O3 is more than 99.95%. The effect on the dispersion and stability of Al2O3 on the water in different conditions including pH, the kind of dispersant and dosage of dispersant were studied. The results show that stabilized Al2O3CMP slurry can be obtained with 6% solid Al2O3, 10% H2O2(mass fraction) as oxidant, 0.99% (volue fraction) amine isopropyl alcohol as dispersant and controlling the range of pH from 3 to 4.
