Structure and Properties of Ti-Si-N Coatings Synthesized by Combining Cathode Arc and Middle-frequency Magnetron Sputtering
来源期刊：Journal Of Wuhan University Of Technology Materials Science Edition2009年第5期
论文作者：杨种田 付德君
文章页码：702 - 705
摘 要：Ti-Si-N composite coatings were synthesized on a novel combining cathode and middle-frequency magnetron sputtering system, designed on an industrial scale. Ti was produced from the arc target and Si from magnetron target during deposition. The influences of negative bias voltage and Si content on the hardness and microstructure of the coatings were investigated. The composite coatings prepared under optimized conditions were characterized to be nc-TiN/a-Si3N4 structure with grain sizes of TiN ranging from 8-15 nm and exhibited a high hardness of 40 GPa. The enhancement of the hardness is suggested to be caused by the nanograin-amorphous structure effects.
杨种田1，付德君2
1. College of Science, China Three Gorges University2. Accelerator Laboratory and Key Laboratory of Acoustic and Photonic, Materials and Devices of Ministry of Education, Wuhan University
摘 要：Ti-Si-N composite coatings were synthesized on a novel combining cathode and middle-frequency magnetron sputtering system, designed on an industrial scale. Ti was produced from the arc target and Si from magnetron target during deposition. The influences of negative bias voltage and Si content on the hardness and microstructure of the coatings were investigated. The composite coatings prepared under optimized conditions were characterized to be nc-TiN/a-Si3N4 structure with grain sizes of TiN ranging from 8-15 nm and exhibited a high hardness of 40 GPa. The enhancement of the hardness is suggested to be caused by the nanograin-amorphous structure effects.
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