Effect of Annealing Duration and Substrates on Structure and Property of Vanadium Dioxide Films
来源期刊：Journal Of Wuhan University Of Technology Materials Science Edition2014年第6期
论文作者：储新宏 TAO Haizheng WAN Meinan WANG Shuo NING Zhiyong XU Na 赵修建
文章页码：1117 - 1123
摘 要：Using the oxidation method from vanadium metal thin films by magnetron sputtering, under the fixed annealing parameters of temperature（400 ℃） and oxygen pressure（103 Pa）, we fabricated a series of vanadium dioxide thin films through the change of annealing durations or substrates（quartz glass or AZOcovered glass）. Characterization of the thermochromic properties together with the X-ray diffraction（XRD） and field emission scanning electron microscopy（FE-SEM） indicates that appropriate annealing duration is a key factor to obtain pure VO2 films and AZO-covered glass is more suitable to obtain the VO2 films with high visible transmittance, good crystallinity and larger near-infrared switching efficiencies（maximum 34% at 2000 nm） compared with the substrate of quartz glass. However, VO2 films on quartz glass exhibit narrower loop（7 ℃） with smart reversible response to temperature. Depth profile XPS spectra further indicate that for the films fabricated on quartz glass from thicker V metal films, the existence of low valence vanadium oxides is inevitable and leads to a lower transmittance in the region of visible light.
储新宏，TAO Haizheng，WAN Meinan，WANG Shuo，NING Zhiyong，XU Na，赵修建
State Key Laboratory of Silicate Materials for Architectures (Wuhan University of Technology)
摘 要：Using the oxidation method from vanadium metal thin films by magnetron sputtering, under the fixed annealing parameters of temperature（400 ℃） and oxygen pressure（103 Pa）, we fabricated a series of vanadium dioxide thin films through the change of annealing durations or substrates（quartz glass or AZOcovered glass）. Characterization of the thermochromic properties together with the X-ray diffraction（XRD） and field emission scanning electron microscopy（FE-SEM） indicates that appropriate annealing duration is a key factor to obtain pure VO2 films and AZO-covered glass is more suitable to obtain the VO2 films with high visible transmittance, good crystallinity and larger near-infrared switching efficiencies（maximum 34% at 2000 nm） compared with the substrate of quartz glass. However, VO2 films on quartz glass exhibit narrower loop（7 ℃） with smart reversible response to temperature. Depth profile XPS spectra further indicate that for the films fabricated on quartz glass from thicker V metal films, the existence of low valence vanadium oxides is inevitable and leads to a lower transmittance in the region of visible light.
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