A Fast Tool Servo System for Fabrication of Micro-structured Surfaces on A Diamond Turning Machine
来源期刊：Journal Of Wuhan University Of Technology Materials Science Edition2009年第S1期
论文作者：王晓慧
文章页码：111 - 114
摘 要：A fast tool servo （FTS） system is developed for the fabrication of non-rotationally symmetric micro-structured surfaces using single-point diamond turning machines.The constructed FTS employs a piezoelectric tube actuator （PZT） to actuate the diamond tool and a capacitive probe as the feedback sensor.To compensate the inherent nonlinear hysteresis behavior of the piezoelectric actuator,Proportional Integral （PI） feedback control is implemented.Besides,a feed-forward control based on a simple feed-forward predictor has been added to achieve better tracking performance.Experimental results indicate that error motions in the performance of the system caused by hysteresis can be reduced greatly and the micro-structured surface is successfully fabricated by implementing the FTS.
王晓慧
Center of Precision Engineering,Harbin Institute of Technology
摘 要：A fast tool servo （FTS） system is developed for the fabrication of non-rotationally symmetric micro-structured surfaces using single-point diamond turning machines.The constructed FTS employs a piezoelectric tube actuator （PZT） to actuate the diamond tool and a capacitive probe as the feedback sensor.To compensate the inherent nonlinear hysteresis behavior of the piezoelectric actuator,Proportional Integral （PI） feedback control is implemented.Besides,a feed-forward control based on a simple feed-forward predictor has been added to achieve better tracking performance.Experimental results indicate that error motions in the performance of the system caused by hysteresis can be reduced greatly and the micro-structured surface is successfully fabricated by implementing the FTS.
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