Investigation on Adsorption State of Surface Adsorbate on Silicon Wafer
来源期刊:Rare Metals1999年第2期
论文作者:刘玉岭 刘纳 曹阳
文章页码:3 - 5
摘 要:1IntroductionTheminimalfeaturesizeonthemicroelectronicdeviceshadbendevelopedtolesthan0.35μm.Thisvaluewilchangeto0.05μminnex...
刘玉岭,刘纳,曹阳
摘 要:1IntroductionTheminimalfeaturesizeonthemicroelectronicdeviceshadbendevelopedtolesthan0.35μm.Thisvaluewilchangeto0.05μminnex...
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