A NEW CONCEPT TOWARD INDUSTRIALIZATION OF Cu-Ⅲ-Ⅵ2 THIN FILM SOLAR CELLS AND SOME PRELIMINARY EXPERIMENT RESULTS
来源期刊：Acta Metallurgica Sinica2005年第3期
论文作者：L.X. Shao H.L. Hwang
Key words：Cu-Ⅲ-Ⅵ2 thin film solar cells; full reactive sputtering;
Abstract: A new concept of full vacuum manufacturing for Cu-Ⅲ-Ⅳ2 thin-film solar cells has been discussed. Cu-Ⅲ-Ⅳ2 thin-film solar cells manufactured using full in-line reactive sputtering will result in lower cost than that of the conventional method with CdS layer fabricated with chemical bath deposition (CBS) method. Using reactive sputtering process with organometallic gases, the compositions and electronic properties of Cu-Ⅲ-Ⅳ2 thin-film can be fine-tuned and precisely controlled. n-type Cu-Ⅲ-Ⅳ2 film and ZnS suffer layer can also be deposited using the in-line sputtering instead of using the CdS layer. The environmental pollution problems arising from using CdS can be eliminated and the ultimate goal of full in-line process development can then be realized. Some preliminary experimental results on a modal solar cell fabricated by the new technique in the new concept have been presented.
L.X. Shao1，H.L. Hwang2
(1.School of Information Technology and Science, Zhanjiang Normal College, Zhanjiang 524048, China;
2.Department of Electrical Engineering, National Tsing Hua University, Taiwan 300, China)
Abstract:A new concept of full vacuum manufacturing for Cu-Ⅲ-Ⅳ2 thin-film solar cells has been discussed. Cu-Ⅲ-Ⅳ2 thin-film solar cells manufactured using full in-line reactive sputtering will result in lower cost than that of the conventional method with CdS layer fabricated with chemical bath deposition (CBS) method. Using reactive sputtering process with organometallic gases, the compositions and electronic properties of Cu-Ⅲ-Ⅳ2 thin-film can be fine-tuned and precisely controlled. n-type Cu-Ⅲ-Ⅳ2 film and ZnS suffer layer can also be deposited using the in-line sputtering instead of using the CdS layer. The environmental pollution problems arising from using CdS can be eliminated and the ultimate goal of full in-line process development can then be realized. Some preliminary experimental results on a modal solar cell fabricated by the new technique in the new concept have been presented.
Key words:Cu-Ⅲ-Ⅵ2 thin film solar cells; full reactive sputtering;
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