溶胶—凝胶工艺制备的TiO₂纳米薄膜及其表面结构

来源期刊：中国有色金属学报1999年第4期

论文作者：余家国 赵修建

文章页码：815 - 820

关键词：TiO₂纳米薄膜；溶胶—凝胶工艺；表面结构

Key words：TiO₂ nanometer thin films; sol-gel processing; surface structure

摘    要：采用溶胶—凝胶工艺在玻璃表面制备了均匀透明的锐钛矿型TiO₂纳米薄膜，其颗粒大小在40～80 nm。薄膜的X射线衍射分析表明，当薄膜的厚度小于0.45μm时，薄膜中未出现明显的锐钛矿的衍射峰。X射线光电子能谱(XPS)和电子自旋共振谱(ESR)的实验结果表明：薄膜中除含有Ti，O元素外，还有一定量的来自有机前驱物中未完全燃烧的碳和少量从玻璃表面扩散到薄膜中的Na和Ca元素；Ti元素除了以＋4价形式存在外，还有一定量的Ti以＋3和＋2价形式存在。TiO₂ 薄膜在530nm附近的宽吸收带也证实了TiO₂薄膜中低价钛元素的存在。

Abstract: The uniform transparent anatase nanometer TiO₂ thin films were deposited on glass substrates by sol-gel processing. The diameters of TiO₂ particles in the thin films are in the range of 40～80nm. When the thickness of the films is lower than 0.45μm, XRD patterns of films show no peak of anatase. The chemical composition and the valency state of the film were analyzed with X-ray photoelectron spectroscopy(XPS) and electron spin resonance(ESR). Experiment results show that besides Ti and O elements, there is a certain amount of residual carbon from the starting organometallic components and a small amount of sodium and calcium ions diffused from the glass substrates. Although the valency state of Ti element mainly exist in oxides of Ti (Ⅳ), there is a certain amount of oxides of Ti(Ⅲ) and Ti(Ⅱ). The ultraviolet-visible spectra of the TiO₂ thin films appear the wide adsorption band in the wavelength about 530nm, which further confirms that there are a certain amount of oxides of Ti(Ⅲ) and Ti(Ⅱ) in the TiO₂ thin films.