Investigation on Defects in High-rate Magnetron Sputtered CoCr Coatings
来源期刊：JOURNAL OF MATERIALS SCIENCE TECHNOLOG1989年第5期
论文作者：周浪 章守华 叶锐曾 高良
文章页码：346 - 350
摘 要：<正> Coatings obtained with magnetron sputteringexhibit a columnay structure. There are nodulardefects distributed in the coatings, which arefomed by radial growth of columnay grains ingroups. The fomation of them does not necessarilydepend on surface asperities of substrate. Thecolumnar grain boundaries are enriched in oxygen,which causes microporosity in the intercolumnarregions.
周浪，章守华，叶锐曾，高良
摘 要：<正> Coatings obtained with magnetron sputteringexhibit a columnay structure. There are nodulardefects distributed in the coatings, which arefomed by radial growth of columnay grains ingroups. The fomation of them does not necessarilydepend on surface asperities of substrate. Thecolumnar grain boundaries are enriched in oxygen,which causes microporosity in the intercolumnarregions.
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