RESEARCH ON PREPARATION OF ULTRAFINE ALN POWDERS
来源期刊：Journal Of Wuhan University Of Technology Materials Science Edition1994年第3期
论文作者：曹立宏 袁润章 汤宇凌 卓云峰
文章页码：45 - 50
摘 要：<正>The high purity of ultrafine power（UFP）of a-luminium nitride（AlN） are prepared by the reaction of nitrogenplasma with metal aluminium in D.C.plasma reactr.Both thenitriding principle and the AlN nucleation mechanism are stud-ied.The rusults,indicate that the chemical reaction in the forma-tion process of AlN UFP is very complicated and the nitridingreaction is corelated to the concentration of reactants and thetemperature.The particle size cav be adjusted by controlling thepartial pressure of the reactants,the temperature and the react-ing rate.
曹立宏，袁润章，汤宇凌，卓云峰
摘 要：<正>The high purity of ultrafine power（UFP）of a-luminium nitride（AlN） are prepared by the reaction of nitrogenplasma with metal aluminium in D.C.plasma reactr.Both thenitriding principle and the AlN nucleation mechanism are stud-ied.The rusults,indicate that the chemical reaction in the forma-tion process of AlN UFP is very complicated and the nitridingreaction is corelated to the concentration of reactants and thetemperature.The particle size cav be adjusted by controlling thepartial pressure of the reactants,the temperature and the react-ing rate.
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