Effect of Au film pre-deposited at different durations as inner electrode on the electrical properties and interface microstructures of Na₂O-PbO-Nb₂O₅-SiO₂ multi-layer glass-ceramic capacitors

Jun ZHU, Jun LUO, Qingmeng ZHANG and Jun DU Advanced Electronic Materials Institute, General Research Institute for Nonferrous Metals, Beijing 100088, China

摘 要：To further study the effect of sputtered Au film as transition electrode layer on the electrical properties and interface microstructures of Na 2 O-PbO-Nb 2 O 5 -SiO 2 multilayer glass-ceramic capacitors, Au films pre-deposited at different time were prepared by DC magnetron sputtering. Compared with the single paste electrode structure, samples with Au films pre-deposited from 6 to 18 min have the consistent performance to effectively improve the electrical properties of the capacitors, resulting in the doubled breakdown strength, an increase of equivalent capacitance by 22% and a decrease of leakage current by an order of magnitude. SEM observations indicate that the Au films with deposition time from 6 to 18 min would all help the formation of a dense electrode/dielectric interface and inhibit the diffusion of Ag. The results reveal that Au film pre-deposited for 6 min as inner electrode was sufficient to improve the interface microstructure and therefore to inhibit the Ag diffusion and enhance the overall performance of the multi-layer glass-ceramic capacitors.

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