Effects of Annealing Temperature on the Properties of Copper Films Prepared by Magnetron Sputtering
来源期刊：Journal Of Wuhan University Of Technology Materials Science Edition2015年第1期
论文作者：刘一鸣 ZHANG Jianjun ZHANG Wanggang 梁伟 YU Bin XUE Jinbo
文章页码：92 - 96
摘 要：Copper oxide thin films were prepared by a direct-current magnetron sputtering method followed by a thermal annealing treatment at 100-500 °C. The obtained films were characterized by X-ray diffraction, UV–vis absorption spectroscopy, scanning electron microscopy, Raman spectroscopy, and X-ray photoelectron spectroscopy. With the increase of the annealing temperature, it was found that the films transformed sequentially from amorphous to single-phase Cu（100 ℃）, mixed-phase of Cu and Cu2O（150 ℃）, single-phase Cu2O（200 ℃）, then to mixed-phase of Cu2 O and Cu O（300 ℃）, and finally to single-phase Cu O（400- 500 ℃）. Further analyses indicated that the Cu/Cu2 O thin films and the Cu2 O thin films presented no further oxidation even on the surface in air atmosphere. Additionally, the visible-light photocatalytic behavior of the copper oxide thin films on the degradation of methylene blue（MB） was also investigated, indicating that the films with pure Cu2 O phase or Cu/Cu2 O mixed phases have excellent photocatalytic efficiencies.
刘一鸣1,2，ZHANG Jianjun1，ZHANG Wanggang1，梁伟1，YU Bin1，XUE Jinbo1
1. College of Materials Science and Engineering, Taiyuan University of Technology
摘 要：Copper oxide thin films were prepared by a direct-current magnetron sputtering method followed by a thermal annealing treatment at 100-500 °C. The obtained films were characterized by X-ray diffraction, UV–vis absorption spectroscopy, scanning electron microscopy, Raman spectroscopy, and X-ray photoelectron spectroscopy. With the increase of the annealing temperature, it was found that the films transformed sequentially from amorphous to single-phase Cu（100 ℃）, mixed-phase of Cu and Cu2O（150 ℃）, single-phase Cu2O（200 ℃）, then to mixed-phase of Cu2 O and Cu O（300 ℃）, and finally to single-phase Cu O（400- 500 ℃）. Further analyses indicated that the Cu/Cu2 O thin films and the Cu2 O thin films presented no further oxidation even on the surface in air atmosphere. Additionally, the visible-light photocatalytic behavior of the copper oxide thin films on the degradation of methylene blue（MB） was also investigated, indicating that the films with pure Cu2 O phase or Cu/Cu2 O mixed phases have excellent photocatalytic efficiencies.
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